Large chamber scanning electron microscope (LC-SEM)

The large-chamber SEM is a unique device that has been operated in Fürth since 2006 and has been continuously optimized since then. The remarkable chamber is two cubic meters in size, which allows a servohydraulic machine to fit inside it completely. The newly designed electron gun assembly offers a lot of flexibility, samples can thus be viewed from all possible angles. It also combines multiple analytical detectors such as EDS and EBSD. Currently, the large chamber SEM is used for in-situ fatigue testing as well as interrupted monitoring of large industrial components.

Responsible employees: